Photodecomposition of precursors for metal organic vapour...

Applied Surface Science 1992 Vol. 54; Iss. none

Photodecomposition of precursors for metal organic vapour phase epitaxy

Wolfgang Richter, Paul Kurpas, Margret Waschbüsch
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Volume:
54
Year:
1992
Language:
english
Pages:
7
DOI:
10.1016/0169-4332(92)90008-l
File:
PDF, 348 KB
english, 1992
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