Deposition of ceramics by LPVD

Applied Surface Science 1992 Vol. 54; Iss. none

Deposition of ceramics by LPVD

J. Funken, E.W. Kreutz, M. Krösche, H. Sung, A. Voss, G. Erkens, O. Lemmer, T. Leyendecker
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Volume:
54
Year:
1992
Language:
english
Pages:
6
DOI:
10.1016/0169-4332(92)90034-u
File:
PDF, 738 KB
english, 1992
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