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Resistless inverse projection patterning of aluminum by using synchrotron radiation induced suppression of thermal chemical vapor deposition
Fumihiko Uesugi, Iwao NishiyamaVolume:
54
Year:
1992
Language:
english
Pages:
7
DOI:
10.1016/0169-4332(92)90057-5
File:
PDF, 539 KB
english, 1992