Influence of hydrogen on the structure and surface morphology of pulsed ArF excimer laser crystallized amorphous silicon thin films
E.L. Mathé, A. Naudon, M. Elliq, E. Fogarassy, S. de UnamunoVolume:
54
Year:
1992
Language:
english
Pages:
9
DOI:
10.1016/0169-4332(92)90077-b
File:
PDF, 726 KB
english, 1992