Influence of hydrogen on the structure and surface...

Influence of hydrogen on the structure and surface morphology of pulsed ArF excimer laser crystallized amorphous silicon thin films

E.L. Mathé, A. Naudon, M. Elliq, E. Fogarassy, S. de Unamuno
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Volume:
54
Year:
1992
Language:
english
Pages:
9
DOI:
10.1016/0169-4332(92)90077-b
File:
PDF, 726 KB
english, 1992
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