Ablation of thin polymer films on Si or metal substrate...

Applied Surface Science 1992 Vol. 54; Iss. none

Ablation of thin polymer films on Si or metal substrate with the low intensity UV beam of an excimer laser or mercury lamp: advantages of ellipsometric rate measurements

Matthias Bolle, Sylvain Lazare
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Volume:
54
Year:
1992
Language:
english
Pages:
6
DOI:
10.1016/0169-4332(92)90089-g
File:
PDF, 392 KB
english, 1992
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