![](/img/cover-not-exists.png)
Direct projection patterning of aluminum on the SiO2 surface by using synchrotron radiation induced growth initiation of thermal chemical vapor deposition
Fumihiko Uesugi, Iwao NishiyamaVolume:
62
Year:
1992
Language:
english
Pages:
6
DOI:
10.1016/0169-4332(92)90140-s
File:
PDF, 421 KB
english, 1992