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TEM and SXES study of Ni-silicide/Si interface: crystallographic relationship with the Si substrates
S. Yamauchi, M. Hirai, M. Kusaka, M. Iwami, H. Nakamura, Y. Yokota, A. Akiyama, H. WatabeVolume:
60-61
Year:
1992
Language:
english
Pages:
8
DOI:
10.1016/0169-4332(92)90446-5
File:
PDF, 3.00 MB
english, 1992