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Monte-Carlo simulation study of the vacuum deposition process
Yasushi Sasajina, Tatsuyuki Tsukida, Satoru Ozawa, Ryoichi YamamotoVolume:
60-61
Year:
1992
Language:
english
Pages:
7
DOI:
10.1016/0169-4332(92)90491-f
File:
PDF, 1.10 MB
english, 1992