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Electrical properties of SiNx/thin-Si-interlayer/GaAs MIS systems ruled by surface superstructures of GaAs and crystallinity of Si interlayers
Shinji Fujieda, Emmanuel Benoit, Toshio BabaVolume:
60-61
Year:
1992
Language:
english
Pages:
5
DOI:
10.1016/0169-4332(92)90502-o
File:
PDF, 431 KB
english, 1992