Depth resolution for AES sputter profiles of GaAs/GaInAs strained superlattices
J. Morais, T.A. Fazan, R. LandersVolume:
72
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0169-4332(93)90008-y
File:
PDF, 291 KB
english, 1993