Characterisation of TiN coatings and of the TiN/Si...

Applied Surface Science 1993 Vol. 68; Iss. 4

Characterisation of TiN coatings and of the TiN/Si interface by X-ray photoelectron spectroscopy and Auger electron spectroscopy

P.-Y. Jouan, M.-C. Peignon, Ch. Cardinaud, G. Lempérière
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Volume:
68
Year:
1993
Language:
english
Pages:
9
DOI:
10.1016/0169-4332(93)90241-3
File:
PDF, 625 KB
english, 1993
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