![](/img/cover-not-exists.png)
Topography development on the surface of a semiconductor heterostructure under Ar+ ion-beam milling
N.A. Bert, A.O. Kosogov, Yu.G. MusikhinVolume:
72
Year:
1993
Language:
english
Pages:
12
DOI:
10.1016/0169-4332(93)90376-m
File:
PDF, 1003 KB
english, 1993