Method for sputter rate determination in sputter depth...

Applied Surface Science 1993 Vol. 70-71; Iss. part-P1

Method for sputter rate determination in sputter depth profiling

F. López, M.V. García-Cuenca, J.M. Asensi, J.L. Morenza
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Volume:
70-71
Year:
1993
Language:
english
Pages:
5
DOI:
10.1016/0169-4332(93)90400-6
File:
PDF, 394 KB
english, 1993
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