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Laser-induced deposition of aluminium on gallium arsenide and silicon nitride from trimethylamine alane
T. Frugier, A. Boulahia, A. Sayah, D. Tonneau, J.E. Bourée, J.M. Siffre, D. MencaragliaVolume:
69
Year:
1993
Language:
english
Pages:
5
DOI:
10.1016/0169-4332(93)90523-e
File:
PDF, 494 KB
english, 1993