![](/img/cover-not-exists.png)
Poly-gate structures manufactured in a cluster tool
M. Hendriks, R. de Blank, E. Lindow, J. Mulder, E. Granneman, S. Verhaverbeke, W. Vandervorst, M. HeynsVolume:
70-71
Year:
1993
Language:
english
Pages:
5
DOI:
10.1016/0169-4332(93)90590-8
File:
PDF, 378 KB
english, 1993