The effect of substrate temperature on the properties of sputtered titanium oxide films
Li-jian Meng, M. Andritschky, M.P. dos SantosVolume:
65-66
Year:
1993
Language:
english
Pages:
5
DOI:
10.1016/0169-4332(93)90664-w
File:
PDF, 347 KB
english, 1993