Interface transient layer of amorphous silicon based multilayers measured by in situ ellipsometry
Y. Hatanaka, M. Ohkuwa, T. YamaguchiVolume:
65-66
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0169-4332(93)90710-s
File:
PDF, 291 KB
english, 1993