![](/img/cover-not-exists.png)
Silicon etching techniques and application to mechanical devices
T. Bourouina, S. Spirkovitch, F. Marty, F. Baillieu, E. DonzierVolume:
65-66
Year:
1993
Language:
english
Pages:
7
DOI:
10.1016/0169-4332(93)90716-o
File:
PDF, 1010 KB
english, 1993