Study on the mechanical and chemical properties of (Ti,Al)N films prepared by DC magnetron sputtering
Shengrui Jiang, Dongliang Peng, Xueying Zhao, Liang Xie, Qiang LiVolume:
84
Year:
1995
Language:
english
Pages:
5
DOI:
10.1016/0169-4332(94)00474-9
File:
PDF, 385 KB
english, 1995