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AES and XPS study of thin RF-sputtered Ta2O5 layers
E. Atanassova, T. Dimitrova, J. KoprinarovaVolume:
84
Year:
1995
Language:
english
Pages:
10
DOI:
10.1016/0169-4332(94)00538-9
File:
PDF, 699 KB
english, 1995