Sensitivity of variable angle of incidence spectroscopic...

Applied Surface Science 1994 Vol. 74; Iss. 3

Sensitivity of variable angle of incidence spectroscopic ellipsometry to compositional profiles of graded AlxGa1-xAs-GaAs structures

D.A. Tonova, A.A. Konova
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Volume:
74
Year:
1994
Language:
english
Pages:
8
DOI:
10.1016/0169-4332(94)90004-3
File:
PDF, 598 KB
english, 1994
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