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Ultrahigh vacuum surface analysis of silicon (100) treated in aqueous hydrofluoric acid and buffered hydrofluoric acid solutions
D.E. Sauer, E.M. StuveVolume:
78
Year:
1994
Language:
english
Pages:
9
DOI:
10.1016/0169-4332(94)90030-2
File:
PDF, 531 KB
english, 1994