Combined photochemical processes for silicon technology:...

Applied Surface Science 1994 Vol. 78; Iss. 4

Combined photochemical processes for silicon technology: substrate cleaning, silicon dioxide deposition and annealing

V.Yu. Fominski, A.M. Markeev, O.I. Naumenko, V.N. Nevolin, A.P. Alyokhin, L.A. Vyukov
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Volume:
78
Year:
1994
Language:
english
Pages:
7
DOI:
10.1016/0169-4332(94)90067-1
File:
PDF, 555 KB
english, 1994
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