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Electrical behavior of low-power RF magnetron-sputtered indium tin oxide films on silicon substrate
Bi-Shiou Chiou, Shu-Ta Hsieh, Wen-Fa WuVolume:
74
Year:
1994
Language:
english
Pages:
6
DOI:
10.1016/0169-4332(94)90111-2
File:
PDF, 472 KB
english, 1994