First-order isothermal desorption kinetics of chlorine on...

Applied Surface Science 1994 Vol. 75; Iss. 1-4

First-order isothermal desorption kinetics of chlorine on SiH2Cl2-adsorbed Si(100) surface

Hitoshi Sakamoto, Yuji Takakuwa, Toyokazu Hori, Tetsuhiro Horie, Nobuo Miyamoto
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Volume:
75
Year:
1994
Language:
english
Pages:
6
DOI:
10.1016/0169-4332(94)90131-7
File:
PDF, 430 KB
english, 1994
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