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X-ray photoelectron spectroscopic and atomic force microscopic study of GaAs etching with a HCl solution
Zhen Song, Satoshi Shogen, Masahiro Kawasaki, Ikuo SuemuneVolume:
82-83
Year:
1994
Language:
english
Pages:
7
DOI:
10.1016/0169-4332(94)90224-0
File:
PDF, 963 KB
english, 1994