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Defect-initiated atomic emissions from semiconductor surfaces induced by laser irradiation: electronic cleaning of defects on surfaces
Jun'ichi Kanasaki, Akiko Okano, Yasuo Nakai, Noriaki ItohVolume:
79-80
Year:
1994
Language:
english
Pages:
4
DOI:
10.1016/0169-4332(94)90395-6
File:
PDF, 289 KB
english, 1994