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Photon energy dependence of synchrotron radiation induced growth suppression and initiation in Al chemical vapor deposition
Fumihiko Uesugi, Iwao NishiyamaVolume:
79-80
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/0169-4332(94)90410-3
File:
PDF, 325 KB
english, 1994