Contribution of free electrons to Al CVD on a Si surface by...

Applied Surface Science 1994 Vol. 79-80; Iss. none

Contribution of free electrons to Al CVD on a Si surface by photo-excitation

Kazuya Masu, Michio Yokoyama, Hideki Matsuhashi, Kazuo Tsubouchi
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Volume:
79-80
Year:
1994
Language:
english
Pages:
7
DOI:
10.1016/0169-4332(94)90416-2
File:
PDF, 470 KB
english, 1994
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