UV-assisted deposition of TEOS SiO2 films using the...

Applied Surface Science 1994 Vol. 79-80; Iss. none

UV-assisted deposition of TEOS SiO2 films using the spin-coating method

Koji Kinashi, Michio Niwano, Nobuo Miyamoto, Koji Honma
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Volume:
79-80
Year:
1994
Language:
english
Pages:
6
DOI:
10.1016/0169-4332(94)90432-4
File:
PDF, 385 KB
english, 1994
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