Beam induced phase transformations and self annealing in...

Applied Surface Science 1995 Vol. 91; Iss. 1-4

Beam induced phase transformations and self annealing in as-implanted iron silicides

G. Crecelius, K. Radermacher, Ch. Dieker, S. Mesters
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Volume:
91
Year:
1995
Language:
english
Pages:
6
DOI:
10.1016/0169-4332(95)00093-3
File:
PDF, 974 KB
english, 1995
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