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Process optimization of copper MOCVD using modeling experimental design
Marie-José Mouche, Jean-Luc Mermet, Fabrice Pires, Emmanuel Richard, Joaquin Torres, Jean Palleau, François BraudVolume:
91
Year:
1995
Language:
english
Pages:
5
DOI:
10.1016/0169-4332(95)00107-7
File:
PDF, 465 KB
english, 1995