Ti nitride phases in thin films deposited by DC magnetron...

Applied Surface Science 1995 Vol. 91; Iss. 1-4

Ti nitride phases in thin films deposited by DC magnetron sputtering

Rodica Manaila, Domokos Biro, Peter B. Barna, Miklos Adamik, Florin Zavaliche, Stefan Craciun, Andrei Devenyi
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Volume:
91
Year:
1995
Language:
english
Pages:
8
DOI:
10.1016/0169-4332(95)00134-4
File:
PDF, 1.38 MB
english, 1995
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