XPS studies on SiC thin layers formed by ion implantation with a metal vapor vacuum arc ion source
H. Yan, R.W.M. Kwok, S.P. WongVolume:
92
Year:
1996
Language:
english
Pages:
5
DOI:
10.1016/0169-4332(95)00203-0
File:
PDF, 332 KB
english, 1996