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Mirror polishing of InP wafer surfaces with NaOCl-citric acid
Y. Morisawa, I. Kikuma, N. Takayama, M. TakeuchiVolume:
92
Year:
1996
Language:
english
Pages:
4
DOI:
10.1016/0169-4332(95)00219-7
File:
PDF, 215 KB
english, 1996