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XPS study of the reaction of the Si(100) surface with a C2H4 beam
T. Takagaki, Y. Igari, T. Takaoka, I. KusunokiVolume:
92
Year:
1996
Language:
english
Pages:
4
DOI:
10.1016/0169-4332(95)00243-x
File:
PDF, 271 KB
english, 1996