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Interdiffusion and reactions in the Cu/TiN/Si thin film system
Y.S. Gong, Jing-Cheng Lin, Chiapyng LeeVolume:
92
Year:
1996
Language:
english
Pages:
5
DOI:
10.1016/0169-4332(95)00251-0
File:
PDF, 308 KB
english, 1996