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The determination of the average compositions of amorphous interlayers in the VSi system using a buried ultrathin oxide layer and a capping Mo layer to define the reference planes for interdiffusion
J.H. Lin, L.J. ChenVolume:
92
Year:
1996
Language:
english
Pages:
5
DOI:
10.1016/0169-4332(95)00252-9
File:
PDF, 314 KB
english, 1996