Plasma parameters in pulsed laser-plasma deposition of thin films
S. Metev, M. Ozegowski, G. Sepold, S. BurmesterVolume:
96-98
Year:
1996
Language:
english
Pages:
4
DOI:
10.1016/0169-4332(95)00419-x
File:
PDF, 350 KB
english, 1996