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The role of gas-phase in the laser etching of Cu by CCl4
D. Débarre, A. Aliouchouche, J. Boulmer, B. Bourguignon, J.P. BudinVolume:
96-98
Year:
1996
Language:
english
Pages:
4
DOI:
10.1016/0169-4332(95)00457-2
File:
PDF, 327 KB
english, 1996