![](/img/cover-not-exists.png)
An experimental study and modeling of the thickness distribution in pulsed laser deposited ferroelectric thin films
M. Tyunina, K. Sreenivas, C. Bjormander, J. Wittborn, K.V. RaoVolume:
96-98
Year:
1996
Language:
english
Pages:
5
DOI:
10.1016/0169-4332(95)00592-7
File:
PDF, 393 KB
english, 1996