Influence of interdiffusion and surfactants on Si/SiGe heterointerfaces
H.P. Zeindl, S. Nilsson, U. Jagdhold, J. Klatt, R. Kurps, D. Krüger, E. BugielVolume:
102
Year:
1996
Language:
english
Pages:
5
DOI:
10.1016/0169-4332(96)00031-1
File:
PDF, 349 KB
english, 1996