AFM and STM studies on In2O3 and ITO thin films deposited...

Applied Surface Science 1996 Vol. 99; Iss. 2

AFM and STM studies on In2O3 and ITO thin films deposited by atomic layer epitaxy

Timo Asikainen, Mikko Ritala, Markku Leskelä, Thomas Prohaska, Gernot Friedbacher, Manfred Grasserbauer
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Volume:
99
Year:
1996
Language:
english
Pages:
8
DOI:
10.1016/0169-4332(96)00110-9
File:
PDF, 636 KB
english, 1996
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