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Ultrahigh vacuum system for atomic-scale planarization of 6 inch Si(001) substrate
Ken Idota, Masaaki Niwa, Isao SumitaVolume:
100-101
Year:
1996
Language:
english
Pages:
5
DOI:
10.1016/0169-4332(96)00233-4
File:
PDF, 498 KB
english, 1996