Dissociative scattering of low-energy SiF3+ and SiF+ ions...

Applied Surface Science 1996 Vol. 100-101; Iss. none

Dissociative scattering of low-energy SiF3+ and SiF+ ions (5–200 eV) on Cu(100) surface

Hiroyuki Yamamoto, Yuji Baba, Teikichi A. Sasaki
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Volume:
100-101
Year:
1996
Language:
english
Pages:
5
DOI:
10.1016/0169-4332(96)00236-x
File:
PDF, 392 KB
english, 1996
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