Water vapor effects on theTeO2/Tethin film conductance

Water vapor effects on theTeO2/Tethin film conductance

Shigeru Suehara, Touichi Hatano, Akihiko Nukui
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Volume:
100-101
Year:
1996
Language:
english
Pages:
4
DOI:
10.1016/0169-4332(96)00298-x
File:
PDF, 283 KB
english, 1996
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