A nondestructive analysis technique for residual thin films in deep-submicron contact holes
Ken Ninomiya, Tokuo Kure, Yoshimi Sudo, Katsuhiro Kuroda, Hideo TodokoroVolume:
100-101
Year:
1996
Language:
english
Pages:
5
DOI:
10.1016/0169-4332(96)00337-6
File:
PDF, 400 KB
english, 1996