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In-situ IR and mass spectroscopic study of theAl(CH3)2/Ha-Si:H reaction processes
T. Wadayama, Y. Maiwa, H. Shibata, A. HattaVolume:
100-101
Year:
1996
Language:
english
Pages:
4
DOI:
10.1016/0169-4332(96)00341-8
File:
PDF, 331 KB
english, 1996