Characterization of hard amorphous carbon films deposited with high-energy ion beams
R.G. Pregliasco, G. Zampieri, H. Huck, E.B. Halac, M.A.R. de Benyacar, R. RighiniVolume:
103
Year:
1996
Language:
english
Pages:
7
DOI:
10.1016/0169-4332(96)00475-8
File:
PDF, 566 KB
english, 1996