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Photon energy dependence of synchrotron radiation induced growth suppression and initiation in Al chemical vapor deposition II. Surface analysis by Auger electron spectroscopy
Iwao Nishiyama, Fumihiko UesugiVolume:
103
Year:
1996
Language:
english
Pages:
8
DOI:
10.1016/0169-4332(96)00525-9
File:
PDF, 744 KB
english, 1996