Photon energy dependence of synchrotron radiation induced...

Photon energy dependence of synchrotron radiation induced growth suppression and initiation in Al chemical vapor deposition II. Surface analysis by Auger electron spectroscopy

Iwao Nishiyama, Fumihiko Uesugi
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Volume:
103
Year:
1996
Language:
english
Pages:
8
DOI:
10.1016/0169-4332(96)00525-9
File:
PDF, 744 KB
english, 1996
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